A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

标题
A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation
作者
关键词
-
出版物
Applied Sciences-Basel
Volume 11, Issue 3, Pages 1129
出版商
MDPI AG
发表日期
2021-01-27
DOI
10.3390/app11031129

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