A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation
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Title
A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation
Authors
Keywords
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Journal
Applied Sciences-Basel
Volume 11, Issue 3, Pages 1129
Publisher
MDPI AG
Online
2021-01-27
DOI
10.3390/app11031129
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