Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient

标题
Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient
作者
关键词
-
出版物
SENSORS
Volume 8, Issue 2, Pages 767-783
出版商
MDPI AG
发表日期
2008-12-01
DOI
10.3390/s8020767

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