Effect of Residual Stress on the Mechanical Behaviour of Microswitches at Pull-In

标题
Effect of Residual Stress on the Mechanical Behaviour of Microswitches at Pull-In
作者
关键词
-
出版物
STRAIN
Volume 46, Issue 4, Pages 358-373
出版商
Wiley
发表日期
2010-07-14
DOI
10.1111/j.1475-1305.2009.00651.x

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