Roughness evolution during the atomic layer deposition of metal oxides

NiO Thin Films Synthesized by Atomic Layer Deposition using Ni(dmamb)2 and Ozone as Precursors

(2012) Peter Antony Premkumar et al.   CHEMICAL VAPOR DEPOSITION

Atomic layer-deposited tunnel oxide stabilizes silicon photoanodes for water oxidation

(2011) Yi Wei Chen et al.   NATURE MATERIALS

Gwyddion: an open-source software for SPM data analysis

(2011) David Nečas et al.   Open Physics

Ultrathin Direct Atomic Layer Deposition on Composite Electrodes for Highly Durable and Safe Li-Ion Batteries

(2010) Yoon Seok Jung et al.   ADVANCED MATERIALS

Theoretical Simulation of Surface Evolution Using the Random Deposition and Surface Relaxation for Metal Oxide Film in Atomic Layer Deposition

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Atomic structure of conducting nanofilaments in TiO2 resistive switching memory

(2010) Deok-Hwang Kwon et al.   Nature Nanotechnology

Interdiffusion and crystallization in HfO2/Al2O3 superlattices

(2009) C. Adelmann et al.   APPLIED PHYSICS LETTERS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Nanotubular metal–insulator–metal capacitor arrays for energy storage

(2009) Parag Banerjee et al.   Nature Nanotechnology