Thermal conductivity and thermal boundary resistance of atomic layer deposited high-k dielectric aluminum oxide, hafnium oxide, and titanium oxide thin films on silicon
出版年份 2018 全文链接
标题
Thermal conductivity and thermal boundary resistance of atomic layer deposited high-k dielectric aluminum oxide, hafnium oxide, and titanium oxide thin films on silicon
作者
关键词
-
出版物
APL Materials
Volume 6, Issue 5, Pages 058302
出版商
AIP Publishing
发表日期
2018-05-14
DOI
10.1063/1.5021044
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Plasma-based chemical functionalization of graphene to control the thermal transport at graphene-metal interfaces
- (2017) S.G. Walton et al. SURFACE & COATINGS TECHNOLOGY
- Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High- k Dielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride
- (2017) John T. Gaskins et al. ECS Journal of Solid State Science and Technology
- Implications of Interfacial Bond Strength on the Spectral Contributions to Thermal Boundary Conductance across Solid, Liquid, and Gas Interfaces: A Molecular Dynamics Study
- (2016) Ashutosh Giri et al. Journal of Physical Chemistry C
- The distributed thermal model of fin field effect transistor
- (2016) Mariusz Zubert et al. MICROELECTRONICS RELIABILITY
- Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check
- (2016) W.A. Lanford et al. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
- Impact of Self-Heating on the Statistical Variability in Bulk and SOI FinFETs
- (2015) Liping Wang et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- Thermal Conductance across Phosphonic Acid Molecules and Interfaces: Ballistic versus Diffusive Vibrational Transport in Molecular Monolayers
- (2015) John T. Gaskins et al. Journal of Physical Chemistry C
- Modifying Surface Energy of Graphene via Plasma-Based Chemical Functionalization to Tune Thermal and Electrical Transport at Metal Interfaces
- (2015) Brian M. Foley et al. NANO LETTERS
- Thermal boundary conductance accumulation and interfacial phonon transmission: Measurements and theory
- (2015) Ramez Cheaito et al. PHYSICAL REVIEW B
- Ultra-low thermal conductivity in TiO2:C superlattices
- (2015) Janne-Petteri Niemelä et al. Journal of Materials Chemistry A
- Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3)
- (2014) Caroline S. Gorham et al. APPLIED PHYSICS LETTERS
- Top-Gated Indium–Zinc–Oxide Thin-Film Transistors With In Situ Al2O3/HfO2 Gate Oxide
- (2014) Yang Song et al. IEEE ELECTRON DEVICE LETTERS
- Measurement of In-Plane Thermal Conductivity of Ultrathin Films Using Micro-Raman Spectroscopy
- (2014) Zhe Luo et al. Nanoscale and Microscale Thermophysical Engineering
- Ion irradiation of the native oxide/silicon surface increases the thermal boundary conductance across aluminum/silicon interfaces
- (2014) Caroline S. Gorham et al. PHYSICAL REVIEW B
- Influence of interfacial properties on thermal transport at gold:silicon contacts
- (2013) J. C. Duda et al. APPLIED PHYSICS LETTERS
- A New Rounded Edge Fin Field Effect Transistor for Improving Self-Heating Effects
- (2013) Ali A. Orouji et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- Detection of surface electronic defect states in low and high-k dielectrics using reflection electron energy loss spectroscopy
- (2013) Benjamin L. French et al. JOURNAL OF MATERIALS RESEARCH
- Systematically controlling Kapitza conductance via chemical etching
- (2012) John C. Duda et al. APPLIED PHYSICS LETTERS
- Bidirectionally tuning Kapitza conductance through the inclusion of substitutional impurities
- (2012) John C. Duda et al. JOURNAL OF APPLIED PHYSICS
- Manipulating Thermal Conductance at Metal–Graphene Contacts via Chemical Functionalization
- (2012) Patrick E. Hopkins et al. NANO LETTERS
- Bonding-induced thermal conductance enhancement at inorganic heterointerfaces using nanomolecular monolayers
- (2012) Peter J. O’Brien et al. NATURE MATERIALS
- Effects of chemical bonding on heat transport across interfaces
- (2012) Mark D. Losego et al. NATURE MATERIALS
- Effect of dislocation density on thermal boundary conductance across GaSb/GaAs interfaces
- (2011) Patrick E. Hopkins et al. APPLIED PHYSICS LETTERS
- Thermal conductivity and refractive index of hafnia-alumina nanolaminates
- (2011) Nicholas T. Gabriel et al. JOURNAL OF APPLIED PHYSICS
- A study of highly crystalline novel beryllium oxide film using atomic layer deposition
- (2011) J.H. Yum et al. JOURNAL OF CRYSTAL GROWTH
- Mass and bond density measurements for PECVD a-SiCx:H thin films using Fourier transform-infrared spectroscopy
- (2011) S.W. King et al. JOURNAL OF NON-CRYSTALLINE SOLIDS
- Controlling thermal conductance through quantum dot roughening at interfaces
- (2011) Patrick E. Hopkins et al. PHYSICAL REVIEW B
- Implications of cross-species interactions on the temperature dependence of Kapitza conductance
- (2011) John C. Duda et al. PHYSICAL REVIEW B
- Electrical and physical characteristics for crystalline atomic layer deposited beryllium oxide thin film on Si and GaAs substrates
- (2011) J.H. Yum et al. THIN SOLID FILMS
- Role of dispersion on phononic thermal boundary conductance
- (2010) John C. Duda et al. JOURNAL OF APPLIED PHYSICS
- Criteria for Cross-Plane Dominated Thermal Transport in Multilayer Thin Film Systems During Modulated Laser Heating
- (2010) Patrick E. Hopkins et al. JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME
- On the Assumption of Detailed Balance in Prediction of Diffusive Transmission Probability During Interfacial Transport
- (2010) John C. Duda et al. Nanoscale and Microscale Thermophysical Engineering
- Effects of surface roughness and oxide layer on the thermal boundary conductance at aluminum/silicon interfaces
- (2010) Patrick E. Hopkins et al. PHYSICAL REVIEW B
- Thermal Properties of Ultrathin Hafnium Oxide Gate Dielectric Films
- (2009) M.A. Panzer et al. IEEE ELECTRON DEVICE LETTERS
- Influence of Interfacial Mixing on Thermal Boundary Conductance Across a Chromium/Silicon Interface
- (2008) Patrick E. Hopkins et al. JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME
- Two-tint pump-probe measurements using a femtosecond laser oscillator and sharp-edged optical filters
- (2008) Kwangu Kang et al. REVIEW OF SCIENTIFIC INSTRUMENTS
Discover Peeref hubs
Discuss science. Find collaborators. Network.
Join a conversationAdd your recorded webinar
Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.
Upload Now