Piezoelectric aluminum nitride nanoelectromechanical actuators

标题
Piezoelectric aluminum nitride nanoelectromechanical actuators
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 95, Issue 5, Pages 053106
出版商
AIP Publishing
发表日期
2009-08-06
DOI
10.1063/1.3194148

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