Modeling and Characterization of Cantilever-Based MEMS Piezoelectric Sensors and Actuators

标题
Modeling and Characterization of Cantilever-Based MEMS Piezoelectric Sensors and Actuators
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 21, Issue 2, Pages 406-413
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2012-01-18
DOI
10.1109/jmems.2011.2174419

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