Body-Biased Complementary Logic Implemented Using AlN Piezoelectric MEMS Switches

标题
Body-Biased Complementary Logic Implemented Using AlN Piezoelectric MEMS Switches
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 21, Issue 2, Pages 484-496
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2012-02-01
DOI
10.1109/jmems.2011.2179015

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