In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators

A diameter 300 µm Bragg reflector for acoustic isolation of resonant micro-actuators

(2011) G Rogers   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A digitally compensated 1.5 GHz CMOS/FBAR frequency reference

(2010) S. Rai et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Reducing anchor loss in micromechanical extensional mode resonators

(2010) V. Tas et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications

(2009) R. Abdolvand et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Reducing Anchor Loss in MEMS Resonators Using Mesa Isolation

(2009) M. Pandey et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators

(2008) L. Khine et al.   ELECTRONICS LETTERS