Thin Films of High-kOxides and ZnO for Transparent Electronic Devices

Properties and Characterization of ALD Grown Dielectric Oxides for MIS Structures

(2016) S. Gierałtowska et al.   ACTA PHYSICA POLONICA A

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

(2013) Ville Miikkulainen et al.   JOURNAL OF APPLIED PHYSICS

Atomic-layer-deposited ZnO thin-film transistors with various gate dielectrics

(2012) Jaehyun Yang et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

ALD grown zinc oxide with controllable electrical properties

(2012) E Guziewicz et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing

(2012) J A van Delft et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Zinc oxide for electronic, photovoltaic and optoelectronic applications

(2011) M. Godlewski et al.   LOW TEMPERATURE PHYSICS

Influence of atomic layer deposition chemistry on high-k dielectrics for charge trapping memories

(2011) Nikolaos Nikolaou et al.   SOLID-STATE ELECTRONICS

Atomic layer deposition grown composite dielectric oxides and ZnO for transparent electronic applications

(2011) S. Gieraltowska et al.   THIN SOLID FILMS

Atomic layer deposition of HfO2: Effect of structure development on growth rate, morphology and optical properties of thin films

(2010) Raul Rammula et al.   APPLIED SURFACE SCIENCE

ZnO grown by atomic layer deposition: A material for transparent electronics and organic heterojunctions

(2009) E. Guziewicz et al.   JOURNAL OF APPLIED PHYSICS

ZnO layers grown by Atomic Layer Deposition: A new material for transparent conductive oxide

(2009) M. Godlewski et al.   THIN SOLID FILMS

Electrical behavior of zinc oxide layers grown by low temperature atomic layer deposition

(2008) N. Huby et al.   APPLIED PHYSICS LETTERS

Extremely low temperature growth of ZnO by atomic layer deposition

(2008) E. Guziewicz et al.   JOURNAL OF APPLIED PHYSICS

45nm/32nm CMOS – Challenge and perspective

(2008) Kazunari Ishimaru   SOLID-STATE ELECTRONICS

Transparent ZnO-TFT Arrays Fabricated by Atomic Layer Deposition

(2007) Sang-Hee Ko Park et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS