High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient
出版年份 2014 全文链接
标题
High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 105, Issue 13, Pages 133502
出版商
AIP Publishing
发表日期
2014-10-01
DOI
10.1063/1.4896853
参考文献
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