Charge transport mechanism in thin films of amorphous and ferroelectric Hf0.5Zr0.5O2

Title
Charge transport mechanism in thin films of amorphous and ferroelectric Hf0.5Zr0.5O2
Authors
Keywords
Oxygen Vacancy, JETP Letter, Atomic Layer Deposition, Voltage Characteristic, Rutherford Backscattering Spectroscopy
Journal
JETP LETTERS
Volume 102, Issue 8, Pages 544-547
Publisher
Pleiades Publishing Ltd
Online
2016-01-07
DOI
10.1134/s0021364015200047

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