Three-dimensional evaluation of gettering ability of Σ3{111} grain boundaries in silicon by atom probe tomography combined with transmission electron microscopy
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Title
Three-dimensional evaluation of gettering ability of Σ3{111} grain boundaries in silicon by atom probe tomography combined with transmission electron microscopy
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 103, Issue 10, Pages 102102
Publisher
AIP Publishing
Online
2013-09-04
DOI
10.1063/1.4820140
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