Effects of sidewall etching on electrical properties of SiOx resistive random access memory
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Title
Effects of sidewall etching on electrical properties of SiOx resistive random access memory
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 103, Issue 21, Pages 213505
Publisher
AIP Publishing
Online
2013-11-21
DOI
10.1063/1.4832595
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