Control of tensile strain in germanium waveguides through silicon nitride layers
Published 2012 View Full Article
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Title
Control of tensile strain in germanium waveguides through silicon nitride layers
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 100, Issue 20, Pages 201104
Publisher
AIP Publishing
Online
2012-05-16
DOI
10.1063/1.4718525
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Related references
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- (2008) Yu Bai et al. JOURNAL OF APPLIED PHYSICS
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