Al-doped HfO2/In0.53Ga0.47As metal-oxide-semiconductor capacitors

Title
Al-doped HfO2/In0.53Ga0.47As metal-oxide-semiconductor capacitors
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 14, Pages 142901
Publisher
AIP Publishing
Online
2011-04-05
DOI
10.1063/1.3575569

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