Surface and subsurface characterisation in micro-milling of monocrystalline silicon
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Title
Surface and subsurface characterisation in micro-milling of monocrystalline silicon
Authors
Keywords
Micro-milling, Monocrystalline silicon, Ductile mode cutting, Subsurface residual stress, Machining-induced edge chipping, Diamond tool
Journal
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume 81, Issue 5-8, Pages 1319-1331
Publisher
Springer Nature
Online
2015-05-20
DOI
10.1007/s00170-015-7308-7
References
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