Experimental investigation on micromilling of oxygen-free, high-conductivity copper using tungsten carbide, chemistry vapour deposition, and single-crystal diamond micro tools

Title
Experimental investigation on micromilling of oxygen-free, high-conductivity copper using tungsten carbide, chemistry vapour deposition, and single-crystal diamond micro tools
Authors
Keywords
-
Publisher
SAGE Publications
Online
2010-06-27
DOI
10.1243/09544054jem1828sc

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