标题
Surface and subsurface characterisation in micro-milling of monocrystalline silicon
作者
关键词
Micro-milling, Monocrystalline silicon, Ductile mode cutting, Subsurface residual stress, Machining-induced edge chipping, Diamond tool
出版物
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume 81, Issue 5-8, Pages 1319-1331
出版商
Springer Nature
发表日期
2015-05-20
DOI
10.1007/s00170-015-7308-7
参考文献
相关参考文献
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