Novel Heterogeneous Integration Technology of III-V Layers and InGaAs FinFETs to Silicon

Title
Novel Heterogeneous Integration Technology of III-V Layers and InGaAs FinFETs to Silicon
Authors
Keywords
-
Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 24, Issue 28, Pages 4420-4426
Publisher
Wiley
Online
2014-04-07
DOI
10.1002/adfm.201400105

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