Vapor Phase Metal-Assisted Chemical Etching of Silicon

Combining Electroless Filling with Metal-Assisted Chemical Etching to Fabricate 3D Metallic Structures with Nanoscale Resolutions

(2013) O. J. Hildreth et al.   ECS Solid State Letters

3D Spirals with Controlled Chirality Fabricated Using Metal-Assisted Chemical Etching of Silicon

(2012) Owen J. Hildreth et al.   ACS Nano

A DLVO model for catalyst motion in metal-assisted chemical etching based upon controlled out-of-plane rotational etching and force-displacement measurements

(2012) Owen J. Hildreth et al.   Nanoscale

3D Out-of-Plane Rotational Etching with Pinned Catalysts in Metal-Assisted Chemical Etching of Silicon

(2011) Owen J. Hildreth et al.   ADVANCED FUNCTIONAL MATERIALS

Guided Three-Dimensional Catalyst Folding during Metal-Assisted Chemical Etching of Silicon

(2011) Konrad Rykaczewski et al.   NANO LETTERS

Metal-Assisted Chemical Etching of Silicon: A Review

(2010) Zhipeng Huang et al.   ADVANCED MATERIALS

Oxidation Rate Effect on the Direction of Metal-Assisted Chemical and Electrochemical Etching of Silicon

(2010) Zhipeng Huang et al.   Journal of Physical Chemistry C

Wafer-Scale Synthesis of Single-Crystal Zigzag Silicon Nanowire Arrays with Controlled Turning Angles

(2010) Huan Chen et al.   NANO LETTERS

Metal-assisted electrochemical etching of silicon

(2010) Z P Huang et al.   NANOTECHNOLOGY

Three-Dimensional Fabrication at Small Size Scales

(2010) Timothy G. Leong et al.   Small

Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures

(2009) Owen James Hildreth et al.   ACS Nano

An integrated microfluidic device for large-scale in situ click chemistry screening

(2009) Yanju Wang et al.   LAB ON A CHIP

Motility of Metal Nanoparticles in Silicon and Induced Anisotropic Silicon Etching

(2008) Kuiqing Peng et al.   ADVANCED FUNCTIONAL MATERIALS

Metal-assisted chemical etching of silicon in HF–H2O2

(2008) C. Chartier et al.   ELECTROCHIMICA ACTA