Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications

Title
Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 24, Issue 3, Pages 035018
Publisher
IOP Publishing
Online
2014-02-28
DOI
10.1088/0960-1317/24/3/035018

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