Journal
MICROELECTRONIC ENGINEERING
Volume 87, Issue 11, Pages 2317-2322Publisher
ELSEVIER
DOI: 10.1016/j.mee.2010.03.010
Keywords
Quad-cantilever; Low-cost single-sided micro-machining; Self-assembled sensing layer; Trace TNT detection
Categories
Funding
- NSFC [60725414, 60721004]
- Chinese 973 Program [2006CB300405]
- Chinese 863 Project [2006AA04Z365]
- Korean WCU project [R32-2009-000-20087-0]
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This paper presents a quad-cantilever microsensor for on-the-spot detection of ultra-low concentration chemical vapors. Compared with conventional dual-cantilever sensors, the quad-cantilever configuration can form a fully cantilever-formed Wheatstone-bridge that possesses a higher sensitivity of twofold and more balanced condition to compensate for environmental noise like temperature fluctuation or air flow. Besides, the four integrated micro-cantilevers are made of SiO2, with each having a single crystal silicon piezoresistor fully encapsulated by SiO2. Thus, the quad-lever sensor achieves a very low signal noise of 0.2 mu V. For specific detection, sensitive molecule layer is self-assembled on two sensing cantilevers, with another two as reference. The sensors are micro-fabricated with a single-side process from the wafer front-side. With wet anisotropic etch used to release the piezoresistive cantilevers, the new fabrication technique features low-cost and high-yield. Self-assembled with a novel dual-branch specific monolayer, about 100 ppt level trinitrotoluene (TNT) vapor has been rapidly and repeatedly detected. (C) 2010 Elsevier B.V. All rights reserved.
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