Processing of thin SU-8 films

Published 2008 View Full Article

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Title
Processing of thin SU-8 films
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 12, Pages 125020
Publisher
IOP Publishing
Online
2008-11-15
DOI
10.1088/0960-1317/18/12/125020

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