Hybrid multilayer thin-film fabrication by atmospheric deposition process for enhancing the barrier performance

Title
Hybrid multilayer thin-film fabrication by atmospheric deposition process for enhancing the barrier performance
Authors
Keywords
Atmospheric deposition, Hybrid multilayer barrier thin film, Roll-to-roll atmospheric atomic layer deposition (R2R-AALD), Organic–inorganic, Electrohydrodynamic atomization (EHDA)
Journal
Publisher
Springer Nature
Online
2018-06-15
DOI
10.1007/s11998-018-0090-3

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