Determination of thicknesses and temperatures of crystalline silicon wafers from optical measurements in the far infrared region

Total physical thickness measurement of a multi-layered wafer using a spectral-domain interferometer with an optical comb

(2017) Jaeseok Bae et al.   OPTICS EXPRESS

Optical interferometric approach for measuring the geometrical dimension and refractive index profiles of a double-sided polished undoped Si wafer

(2014) Ho-Jae Lee et al.   MEASUREMENT SCIENCE and TECHNOLOGY

Fizeau-type interferometric probe to measure geometrical thickness of silicon wafers

(2014) Jonghan Jin et al.   OPTICS EXPRESS

Utilization of the sum rule for construction of advanced dispersion model of crystalline silicon containing interstitial oxygen

(2014) Daniel Franta et al.   THIN SOLID FILMS

Dispersion model of two-phonon absorption: application to c-Si

(2014) Daniel Franta et al.   Optical Materials Express

Application of Thomas–Reiche–Kuhn sum rule to construction of advanced dispersion models

(2013) Daniel Franta et al.   THIN SOLID FILMS

Broadening of dielectric response and sum rule conservation

(2013) Daniel Franta et al.   THIN SOLID FILMS

Uncertainty improvement of geometrical thickness and refractive index measurement of a silicon wafer using a femtosecond pulse laser

(2012) Saerom Maeng et al.   OPTICS EXPRESS

Thickness and refractive index measurement of a silicon wafer based on an optical comb

(2010) Jonghan Jin et al.   OPTICS EXPRESS