Thickness and refractive index measurement of a silicon wafer based on an optical comb

Published 2010 View Full Article

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Title
Thickness and refractive index measurement of a silicon wafer based on an optical comb
Authors
Keywords
-
Journal
OPTICS EXPRESS
Volume 18, Issue 17, Pages 18339
Publisher
The Optical Society
Online
2010-08-13
DOI
10.1364/oe.18.018339

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