Optical interferometric approach for measuring the geometrical dimension and refractive index profiles of a double-sided polished undoped Si wafer

Published 2014 View Full Article

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Title
Optical interferometric approach for measuring the geometrical dimension and refractive index profiles of a double-sided polished undoped Si wafer
Authors
Keywords
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Journal
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 25, Issue 7, Pages 075202
Publisher
IOP Publishing
Online
2014-05-14
DOI
10.1088/0957-0233/25/7/075202

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