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Title
Anisotropy of Single-Crystal Silicon in Nanometric Cutting
Authors
Keywords
Molecular dynamics simulation, Nanometric cutting, Single-crystal silicon, Anisotropy behavior, Subsurface damage, Chip
Journal
Nanoscale Research Letters
Volume 12, Issue 1, Pages -
Publisher
Springer Nature
Online
2017-04-26
DOI
10.1186/s11671-017-2046-4
References
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