Research on the effects of machining-induced subsurface damages on mono-crystalline silicon via molecular dynamics simulation

Title
Research on the effects of machining-induced subsurface damages on mono-crystalline silicon via molecular dynamics simulation
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 259, Issue -, Pages 66-71
Publisher
Elsevier BV
Online
2012-07-11
DOI
10.1016/j.apsusc.2012.06.087

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