Crystallographic effect on subsurface damage formation in silicon microcutting

Published 2012 View Full Article

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Title
Crystallographic effect on subsurface damage formation in silicon microcutting
Authors
Keywords
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Journal
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 61, Issue 1, Pages 131-134
Publisher
Elsevier BV
Online
2012-04-18
DOI
10.1016/j.cirp.2012.03.070

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