Crystalline silicon surface passivation by thermal ALD deposited Al doped ZnO thin films
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Title
Crystalline silicon surface passivation by thermal ALD deposited Al doped ZnO thin films
Authors
Keywords
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Journal
AIP Advances
Volume 7, Issue 3, Pages 035219
Publisher
AIP Publishing
Online
2017-03-27
DOI
10.1063/1.4979326
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