ALD preparation of high-k HfO2 thin films with enhanced energy density and efficient electrostatic energy storage
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Title
ALD preparation of high-k HfO2 thin films with enhanced energy density and efficient electrostatic energy storage
Authors
Keywords
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Journal
RSC Advances
Volume 7, Issue 14, Pages 8388-8393
Publisher
Royal Society of Chemistry (RSC)
Online
2017-01-26
DOI
10.1039/c6ra27847g
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