ALD preparation of high-k HfO2 thin films with enhanced energy density and efficient electrostatic energy storage

Title
ALD preparation of high-k HfO2 thin films with enhanced energy density and efficient electrostatic energy storage
Authors
Keywords
-
Journal
RSC Advances
Volume 7, Issue 14, Pages 8388-8393
Publisher
Royal Society of Chemistry (RSC)
Online
2017-01-26
DOI
10.1039/c6ra27847g

Ask authors/readers for more resources

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search