Atomic Layer Deposition of Lanthanum Stabilized Amorphous Hafnium Oxide Thin Films

Published 2009 View Full Article

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Title
Atomic Layer Deposition of Lanthanum Stabilized Amorphous Hafnium Oxide Thin Films
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 21, Issue 14, Pages 3096-3101
Publisher
American Chemical Society (ACS)
Online
2009-07-02
DOI
10.1021/cm9001064

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