The role of interactions between abrasive particles and the substrate surface in chemical-mechanical planarization of Si-face 6H-SiC
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Title
The role of interactions between abrasive particles and the substrate surface in chemical-mechanical planarization of Si-face 6H-SiC
Authors
Keywords
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Journal
RSC Advances
Volume 7, Issue 28, Pages 16938-16952
Publisher
Royal Society of Chemistry (RSC)
Online
2017-03-17
DOI
10.1039/c6ra27508g
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