Characterization of colloidal silica abrasives with different sizes and their chemical–mechanical polishing performance on 4H-SiC (0001)

Published 2014 View Full Article

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Title
Characterization of colloidal silica abrasives with different sizes and their chemical–mechanical polishing performance on 4H-SiC (0001)
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 307, Issue -, Pages 414-427
Publisher
Elsevier BV
Online
2014-04-16
DOI
10.1016/j.apsusc.2014.04.048

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