Thin insulating film deposition on copper by atmospheric-pressure plasmas
Published 2017 View Full Article
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Title
Thin insulating film deposition on copper by atmospheric-pressure plasmas
Authors
Keywords
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Journal
Plasma Processes and Polymers
Volume 14, Issue 7, Pages 1600248
Publisher
Wiley
Online
2017-04-10
DOI
10.1002/ppap.201600248
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