The effect of TEOS plasma parameters on the silicon dioxide deposition mechanisms

Published 2013 View Full Article

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Title
The effect of TEOS plasma parameters on the silicon dioxide deposition mechanisms
Authors
Keywords
-
Journal
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 368, Issue -, Pages 86-92
Publisher
Elsevier BV
Online
2013-04-03
DOI
10.1016/j.jnoncrysol.2013.03.008

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