Nitrogen Radical and Plasma Diagnostics in Dual Frequency Hybrid Plasmas to Investigate N2/SiH4PECVD Process

Utility of dual frequency hybrid source for plasma and radical generation in plasma enhanced chemical vapor deposition process

(2015) Kyung Sik Shin et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Langmuir probe measurements of electron energy probability functions in dusty plasmas

(2015) N Bilik et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Plasma diagnostic approach for high rate nanocrystalline Si synthesis in RF/UHF hybrid plasmas using a PECVD process

(2015) B B Sahu et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Emission and absorption spectroscopy study of Ar excited states in 13.56MHz argon plasma operating at sub-atmospheric to atmospheric pressure

(2015) L. Li et al.   SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY

Effectiveness of plasma diagnostic in ultra high frequency and radio frequency hybrid plasmas for synthesis of silicon nitride film at low temperature

(2014) B. B. Sahu et al.   JOURNAL OF APPLIED PHYSICS

Warm electrons are responsible for helicon plasma production

(2014) B B Sahu et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Plasma Diagnostics and Characterizations of Al-Doped ZnO Films Deposited with Low Temperature Sputtering Process

(2013) Yoon S. Choi et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

The effect of dust on electron heating and dc self-bias in hydrogen diluted silane discharges

(2013) E Schüngel et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Optical emission spectroscopy study in the VUV–VIS regimes of a developing low-temperature plasma in nitrogen gas

(2012) A Fierro et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Capacitively coupled radio-frequency discharges in nitrogen at low pressures

(2012) L L Alves et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?

(2011) V A Godyak et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Effect of Incorporated Nitrogen on the Band Alignment of Ultrathin Silicon-oxynitride Films as a Function of the Plasma Nitridation Conditions

(2011) C. J. Yim et al.   JOURNAL OF THE KOREAN PHYSICAL SOCIETY

Electron heating and the electrical asymmetry effect in dual-frequency capacitive CF4discharges

(2011) J Schulze et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Investigation of absorption mechanisms in helicon discharges in conducting waveguides

(2011) A Ganguli et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Measurement of neutral gas temperature in inductively coupled plasmas

(2011) H. Li et al.   Radiation Effects and Defects in Solids

Optical emission spectroscopy as a diagnostic for plasmas in liquids: opportunities and pitfalls

(2010) Peter Bruggeman et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Optical and Langmuir Probe Diagnostics in a Magnetized Hollow Cathode Arc

(2009) Gonzalo Avaria et al.   Plasma Processes and Polymers

A global (volume averaged) model of a nitrogen discharge: I. Steady state

(2009) E G Thorsteinsson et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Absorption spectroscopy measurements of resonant and metastable atom densities in atmospheric-pressure discharges using a low-pressure lamp as a spectral-line source and comparison with a collisional-radiative model

(2009) Eduardo Castaños-Martínez et al.   SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY

Shear Viscosity of Dusty Plasma Obtained on the Basis of the Langevin Dynamics

(2008) T. S. Ramazanov et al.   CONTRIBUTIONS TO PLASMA PHYSICS