Silicon-doped hafnium oxide anti-ferroelectric thin films for energy storage
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Title
Silicon-doped hafnium oxide anti-ferroelectric thin films for energy storage
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 122, Issue 14, Pages 144105
Publisher
AIP Publishing
Online
2017-10-12
DOI
10.1063/1.4989908
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