Low temperature temporal and spatial atomic layer deposition of TiO2 films

Published 2015 View Full Article

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Title
Low temperature temporal and spatial atomic layer deposition of TiO2 films
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 33, Issue 4, Pages 041512
Publisher
American Vacuum Society
Online
2015-06-18
DOI
10.1116/1.4922588

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