Enhancement of optical and mechanical properties of Si nanopillars by ALD TiO2 coating

Title
Enhancement of optical and mechanical properties of Si nanopillars by ALD TiO2 coating
Authors
Keywords
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Journal
RSC Advances
Volume 6, Issue 99, Pages 97070-97076
Publisher
Royal Society of Chemistry (RSC)
Online
2016-10-06
DOI
10.1039/c6ra21742g

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