Atomic layer deposition TiO 2 coated porous silicon surface: Structural characterization and morphological features

Published 2015 View Full Article

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Title
Atomic layer deposition TiO 2 coated porous silicon surface: Structural characterization and morphological features
Authors
Keywords
Atomic layer deposition, Titanium dioxide, Porous silicon
Journal
THIN SOLID FILMS
Volume 589, Issue -, Pages 303-308
Publisher
Elsevier BV
Online
2015-05-29
DOI
10.1016/j.tsf.2015.05.056

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