Enhancement of optical and mechanical properties of Si nanopillars by ALD TiO2 coating
出版年份 2016 全文链接
标题
Enhancement of optical and mechanical properties of Si nanopillars by ALD TiO2 coating
作者
关键词
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出版物
RSC Advances
Volume 6, Issue 99, Pages 97070-97076
出版商
Royal Society of Chemistry (RSC)
发表日期
2016-10-06
DOI
10.1039/c6ra21742g
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