Hybrid simulations of solenoidal radio-frequency inductively coupled hydrogen discharges at low pressures
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Title
Hybrid simulations of solenoidal radio-frequency inductively coupled hydrogen discharges at low pressures
Authors
Keywords
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Journal
PHYSICS OF PLASMAS
Volume 23, Issue 12, Pages 123517
Publisher
AIP Publishing
Online
2016-12-16
DOI
10.1063/1.4971807
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