F-atom kinetics in SF6/Ar inductively coupled plasmas

Published 2016 View Full Article

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Title
F-atom kinetics in SF6/Ar inductively coupled plasmas
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 34, Issue 3, Pages 031305
Publisher
American Vacuum Society
Online
2016-04-01
DOI
10.1116/1.4945003

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