Global model analysis of negative ion generation in low-pressure inductively coupled hydrogen plasmas with bi-Maxwellian electron energy distributions
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Title
Global model analysis of negative ion generation in low-pressure inductively coupled hydrogen plasmas with bi-Maxwellian electron energy distributions
Authors
Keywords
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Journal
PHYSICS OF PLASMAS
Volume 22, Issue 3, Pages 033506
Publisher
AIP Publishing
Online
2015-03-07
DOI
10.1063/1.4914088
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