A global (volume averaged) model of a Cl2/Ar discharge: I. Continuous power

Published 2010 View Full Article

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Title
A global (volume averaged) model of a Cl2/Ar discharge: I. Continuous power
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 11, Pages 115201
Publisher
IOP Publishing
Online
2010-03-05
DOI
10.1088/0022-3727/43/11/115201

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