A global model for C4F8plasmas coupling gas phase and wall surface reaction kinetics

Published 2008 View Full Article

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Title
A global model for C4F8plasmas coupling gas phase and wall surface reaction kinetics
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 19, Pages 195211
Publisher
IOP Publishing
Online
2008-09-20
DOI
10.1088/0022-3727/41/19/195211

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